Silicon Valley Band of Angels │ San Francisco, California
For his pioneering research and development of micro-electromechanical systems (MEMS) technology microscopic systems that merge mechanical and electrical parts—which has wide-ranging applications such as pacemakers, inkjet printers, optical projectors, and airbags.
Kurt Petersen stands prominently as a pioneer of some of the smallest technological marvels in existence. Micro-Electro-Mechanical Systems—commonly known as MEMS—technology is a groundbreaking engineering discipline that merges electronics and mechanical elements at microscopic scales. Over decades of meticulous research, inspired entrepreneurship, and passionate advocacy, Petersen has not only advanced MEMS through his innovative personal contributions but also guided the technology’s development from a laboratory curiosity into a thriving global industry, creating a world filled with microscopic devices that enable smartphones, automobiles, biomedical instruments, and countless other products essential to modern life.
Born and raised in California, Petersen was fascinated early on by electronics and mechanical systems. These two fields were generally considered separate and disconnected by both academia and industry as Petersen pursued his Ph.D. in electrical engineering at the Massachusetts Institute of Technology (MIT) in 1975. After finishing at MIT and joining IBM's prestigious Almaden Research Center that same year, Petersen found himself suddenly amidst researchers bridging the gap between the two disciplines. His curiosity piqued by an out-of-place ink stain in one of the facility's corridors, he followed its trail into a nearby lab where he encountered engineers etching some of the first inkjet printer nozzles into tiny silicon chips. Inspired by the possibilities, Petersen was soon etching his own silicon chips, tiny switches complete with moving parts only visible under a microscope.
At IBM, Petersen made some of his most transformative early contributions, fundamentally shaping MEMS fabrication methods. Notably, in 1982, he authored a seminal paper, “Silicon as a Mechanical Material,” which remains one of the most cited and influential publications in the MEMS community. This landmark paper definitively established silicon’s unique capabilities as an ideal material for micromechanical systems, and its insights helped launch an entire industry around silicon-based MEMS devices.
Petersen’s insight into silicon’s mechanical properties set the stage for revolutionary technologies that continue to influence fields as diverse as healthcare, automotive safety, consumer electronics, and environmental sensing. His research team at IBM successfully developed methods for micromachining silicon, enabling the production of sensors, actuators, resonators, microvalves, and switches at microscopic dimensions. These devices could interact physically with their environments in entirely new ways, opening possibilities for applications ranging from airbag sensors and inkjet printers to advanced biomedical implants.
Yet Petersen’s contributions extended well beyond research labs. Recognizing early on that MEMS would achieve its full potential only through commercialization, he transitioned into entrepreneurship, co-founding several startups that became foundational to the MEMS industry. In 1982, Petersen co-founded Transensory Devices, one of the earliest MEMS-based sensor companies, introducing innovative pressure and acceleration sensors to commercial markets. Later, as co-founder and CTO of NovaSensor in 1985, Petersen spearheaded the development of silicon pressure sensors, transforming medical diagnostics and automotive safety. NovaSensor quickly established itself as a market leader, demonstrating Petersen’s ability to translate cutting-edge research into highly successful commercial products.
Following NovaSensor’s success, Petersen continued to build and guide new ventures. He co-founded Cepheid in 1996, focusing on MEMS-based biomedical diagnostics. Under Petersen’s scientific and technical guidance, Cepheid developed powerful, miniature diagnostic systems that could rapidly detect pathogens, contributing significantly to point-of-care medical testing. The successful commercialization of these innovative MEMS technologies further solidified Petersen’s reputation as a pioneering entrepreneur.
As his startups flourished, Petersen simultaneously became a passionate advocate for the entire MEMS community. Recognizing the importance of collaboration and community-building, he tirelessly promoted interactions between industry, academia, and government funding agencies. He co-founded influential forums, workshops, and conferences, notably the International Conference on Solid-State Sensors, Actuators, and Microsystems (often referred to simply as Transducers), which rapidly became the preeminent gathering of MEMS researchers worldwide. Through these initiatives, Petersen significantly accelerated MEMS development, bringing coherence and momentum to what had previously been a fragmented and dispersed research community.
His role as an advocate was equally significant in influencing policy and funding. Petersen consistently highlighted MEMS’s transformative potential, championing substantial investment from government agencies, industry groups, and venture capitalists. His articulate vision, combined with the demonstrated success of his entrepreneurial ventures, inspired significant public and private support, fueling rapid expansion of the MEMS industry in the United States and abroad.
Throughout his distinguished career, Petersen’s contributions have been widely recognized by prestigious awards and honors, including election to the National Academy of Engineering, the IEEE Medal of Honor from the Institute of Electrical and Electronics Engineers, and the MEMS Industry Group’s Lifetime Achievement Award. Yet beyond these accolades, his most enduring legacy may be the vibrant global MEMS community he helped cultivate. Petersen’s unwavering commitment to mentorship and collaboration inspired generations of MEMS researchers and entrepreneurs, many of whom today occupy leading roles across academia, government laboratories, and industry.
Today, MEMS devices are integral to daily life, from accelerometers in smartphones and gaming systems to sophisticated medical implants that save lives. Kurt Petersen’s pioneering research, entrepreneurial foresight, and mentoring and community-building efforts were instrumental in making this possible. By demonstrating how microscopic engineering can profoundly impact the human experience, Petersen forever reshaped our relationship with technology, cementing his place as a transformative figure in modern engineering history.
Information as of April 2025.